金属ナノ粒子焼結体厚膜層の形成方法

Title:

金属ナノ粒子焼結体厚膜層の形成方法

Document Type and Number:

Japanese Patent JP5252344

Kind Code:

B2

Abstract:

To provide a method of forming a thick film layer of a metal nano particle sintered body having the excellent adhesiveness to a base layer and the high conductivity on a substrate by applying a method of heating the metal nano particle dispersion liquid coating film from the substrate surface side by using a hot plate like substrate heating means.

The substrate with a coating film being plotted on its surface is arranged on a hot plate like substrate heating means which is heated at the temperature Tplate, and heated from a substrate back side in contact with the substrate heating means. The temperature : Tbottom(t) on the substrate surface side of the coating film is set to be in a range of 150-250°C, and set to the temperature selected to be lower than the boiling point Tb-solventof the dispersive solvent contained in the coating film. The surface temperature : Ttop(t) of the coating film is maintained in a range of the temperature difference ΔT(t)=äTbottom(t)-Ttop(t)}≥10°C, the coating film is heated to cause the low-temperature sintering of metal nano particles contained therein.

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JPH0320480

SURFACE OXIDATION TREATMENT OF ALUMINUM

Inventors:

Ueda Masayuki
Hiroshi Saito
Nobuto Terada
Matsudaira Yorishige

Application Number:

JP2008151678A

Publication Date:

July 31, 2013

Filing Date:

June 10, 2008

Export Citation:

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Assignee:

Harima Chemicals Co., Ltd.

International Classes:

C23C20/02; B22F1/02; B22F9/00; B82B3/00; H01B13/00; H05K1/09; H05K3/22; H05K3/38

Domestic Patent References:

JP2007314866A
JP2004218055A
JP2002334618A

Foreign References:

WO2005037465A1

Attorney, Agent or Firm:

Akio Miyazaki
Ishibashi Masayuki
Masaaki Ogata

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