Title:
METHOD OF MANUFACTURING CERAMIC THIN FILM DEVICE AND CERAMIC THIN FILM DEVICE
Document Type and Number:
Japanese Patent JP3684991
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To solve such a problem that, in a process of transferring ceramic thin film elements deposited on a first substrate to a second substrate, the delamination caused between the tin of a bonded member on the second substrate and the second substrate.
SOLUTION: Gold is deposited as a film on the second substrate through a metal capable of ensuring adhesion, and the tin is bonded onto it.
Inventors:
Hiroaki Tamura
Kazumasa Hasegawa
Katsuhiro Takahashi
Kazumasa Hasegawa
Katsuhiro Takahashi
Application Number:
JP2000082538A
Publication Date:
August 17, 2005
Filing Date:
March 23, 2000
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
C04B37/00; H01L21/8242; H01L27/10; H01L27/108; H01L41/08; H01L41/18; H01L41/22; H01L41/29; H01L41/313; (IPC1-7): H01L27/10; C04B37/00; H01L21/8242; H01L27/108; H01L41/08; H01L41/18; H01L41/22
Domestic Patent References:
| JP2001274359A | ||||
| JP2001274358A | ||||
| JP2001053241A | ||||
| JP11340419A | ||||
| JP11330682A | ||||
| JP11239870A | ||||
| JP11220103A | ||||
| JP10202874A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Osamu Suzawa