Title:
METHOD OF MANUFACTURING FUNCTIONAL FILM
Document Type and Number:
Japanese Patent JP2014141707
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a functional film such that a thin film formed on a surface of a base material is substantially constant in film quality from the head to the tail of the base material.SOLUTION: There is provided a method of manufacturing a functional film in which a base material 1 wound around a feed roll 10 is fed out, a thin film is formed on a surface of the base material 1, and the base material is wound around a take-up roll 17 and stored, the method of manufacturing the functional film including a process (S103) of measuring total pressure of a gas at a film formation part in a vacuum chamber 30 and partial pressure of each component gas to the pressure by pressure measuring means 41, a process (S104) of controlling pressure regulating means 42 by control means 43 so as to hold the pressure and partial pressure substantially constant by control means 43 on the basis of measurement results of the pressure measuring means 41 until a thin film is formed on the top surface of the base material 1 from the head to the tail of the base material 1, and a process (S105) of forming the thin film on the surface of the base material 1 by the film formation part.
Inventors:
SAKKA KENJI
SUZUKI KAZUO
SUZUKI KAZUO
Application Number:
JP2013010530A
Publication Date:
August 07, 2014
Filing Date:
January 23, 2013
Export Citation:
Assignee:
KONICA MINOLTA INC
International Classes:
C23C16/52; C23C16/02; C23C16/44
Domestic Patent References:
| JP2001026868A | 2001-01-30 | |||
| JP2009013473A | 2009-01-22 | |||
| JP2011153340A | 2011-08-11 | |||
| JP2000282237A | 2000-10-10 | |||
| JP2000192237A | 2000-07-11 | |||
| JP2009013473A | 2009-01-22 | |||
| JP2000355071A | 2000-12-26 |
Foreign References:
| WO2012176824A1 | 2012-12-27 |
Attorney, Agent or Firm:
Hatta International Patent Corporation