To shorten reduction processing time and improve static electricity characteristic improvement effect of a substrate, in a method for manufacturing the lithium tantalate substrate for a surface acoustic wave element.
This manufacturing method is constituted by including a step wherein heating reduction of lithium tantalate material is performed at temperature of at least Curie temperature (Tc) of lithium tantalate and lithium tantalate reducing agent is manufactured, a step wherein the lithium tantalate reducing agent and a lithium tantalate substrate in which single polarization processing was performed are alternately laminated and a lithium tantalate lamination is formed, a step wherein the lamination is heated at temperature under Curie temperature (Tc) of lithium tantalate and the lithium tantalate substrate is reduced, and a step wherein the lithium tantalate substrate is isolated from the lamination and worked and a substrate for a surface acoustic wave element is manufactured.
BAE YOUNG-JAE
KIM HAN-GYUN
