Title:
METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
Document Type and Number:
Japanese Patent JP2003297762
Kind Code:
A
Abstract:
To provide a technology capable of easily recovering an original condition when the rotor of a vacuum pump in a CVD device becomes non- rotatable due to the adhesion of reaction by-products.
At least either a reverse gear RGER for reversing the rotation of a rotor or a reduction LGER gear for rotating a rotor by decreasing a gear ratio is formed between a motor MOT and a rotor so that the non-rotatable rotor can be rotated into a rotatable condition again. Thus, it is possible to peel reaction by-products adhered to the inside of a casing CAS due to the rotation of the rotor.
Inventors:
HONMA KIYOHIRO
Application Number:
JP2002101586A
Publication Date:
October 17, 2003
Filing Date:
April 03, 2002
Export Citation:
Assignee:
HITACHI LTD
RENESAS NTHN JP SEMICONDUCTOR
RENESAS NTHN JP SEMICONDUCTOR
International Classes:
F04C25/02; C23C16/455; F04C28/08; F04C29/00; H01L21/205; H01L21/285; H01L21/768; F04C13/00; F04C18/12; (IPC1-7): H01L21/205; F04C25/02; H01L21/285; H01L21/768
Attorney, Agent or Firm:
Yamato Tsutsui
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