To provide a method of manufacturing a TFT array substrate and an optoelectric device, in which cost can be reduced by performing an highly accurate inspection equivalent to a lighting inspection in a stage of TFT array substrate.

In a manufacturing method of a liquid crystal device, in the stage of completion of manufacturing the TFT array 200, the substrate is checked for a operation before a panel is assembled. That is, a data drive circuit 60 and a scanning line drive circuit 70 are supplied with power or signals from an input/output terminal 45 of the TFT array substrate 200 to actuate TFTs 10A, 10B and 10C, and it is inspected as to whether a very weak light with a wavelength between a visual region and a near-infrared region is generated on the TFT array substrate 200 by emission microscope.