To provide a method for measuring a step that can measure the size of a big step with high accuracy using a scanning electron microscope without breaking sample.
This method or device comprises an electronic beam scan process scanning electronic beams on a sample W by an electronic lens-barrel 12, a second electronic beam detection process detecting the intensity α of the secondary electrons flown out from the sample W by the scanning electronic beams using a second detector 13, a detection process detecting a detection signal profile based upon the intensity α of the secondary electrons obtained at the second electronic beam detection process, and a calculation process calculating the depth of a step by comparing the detection signal profile obtained at this detection process with a detection signal profile at a predetermined depth of the step.
AKAMA YOSHIAKI
HAYASHI MASAKAZU
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