酸発生剤、レジスト組成物及びレジストパターンの製造方法

Title:

酸発生剤、レジスト組成物及びレジストパターンの製造方法

Document Type and Number:

Japanese Patent JP6999330

Kind Code:

B2

Abstract:

A salt represented by formula (I): wherein R1 and R2 independently each represent a C6-C18 unsubstituted or substituted aromatic hydrocarbon group, X1 represents a C1-C12 divalent aliphatic saturated hydrocarbon group in which a methylene group can be replaced by an oxygen atom or a carbonyl group, and A- represents an organic anion.

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Inventors:

Hiroshi Sakamoto
Higo Mutsuko
Koji Ichikawa

Application Number:

JP2017161430A

Publication Date:

January 18, 2022

Filing Date:

August 24, 2017

Export Citation:

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Assignee:

Sumitomo Chemical Co., Ltd.

International Classes:

G03F7/004; C07C309/12; C07C309/17; C07C381/12; C09K3/00; G03F7/038; G03F7/039; G03F7/20

Domestic Patent References:

JP2018048117A
JP2018043978A
JP2018043977A
JP2018043976A
JP2018043979A
JP2004361577A

Other References:

Cimetiere, B.; Jacob, L.; Julia, M.,Optically active oxiranes. Synthesis of PAF(platelet aggregating factor),Bulletin de la Societe Chimique de France,1991年,Nov.-Dec.,pp.926-938

Attorney, Agent or Firm:

Fukami patent office

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