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Patent Searching and Data


Title:
METHOD FOR PRODUCING ORGANIC INORGANIC COMPLEX
Document Type and Number:
Japanese Patent JP2007112910
Kind Code:
A
Abstract:

To provide an organic inorganic complex which can form films maintaining a low dielectric constant and capable of achieving higher mechanical strengths, to provide a film comprising the organic inorganic complex, and to provide a method for producing a semiconductor device using the film.

This method for producing an organic inorganic complex comprises hydrolyzing and dehydratively condensing a cross-linking compound represented by formula (1) (M is Si or the like; X is -O- bond participating in cross-linking, or the like; R1 is a divalent group containing a cyclic hydrocarbon or its derivative at a non-terminal portion; R2 is methyl or the like; n1, n2 are each an integer of 0 to 2).


Inventors:
HIRATA KUNIO
MASAKADO AKIRO
NOMURA SHIGEKI
Application Number:
JP2005306401A
Publication Date:
May 10, 2007
Filing Date:
October 20, 2005
Export Citation:
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Assignee:
SEKISUI CHEMICAL CO LTD
International Classes:
C08G79/00; C08G77/52; H01L21/312
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki