Title:
塩、酸発生剤、レジスト組成物及びレジストパターンの製造方法
Document Type and Number:
Japanese Patent JP7081413
Kind Code:
B2
Abstract:
A salt represented by the formula (I):
Inventors:
Katsuhiro Komuro
▲高▼橋 優樹
Koji Ichikawa
▲高▼橋 優樹
Koji Ichikawa
Application Number:
JP2018172243A
Publication Date:
June 07, 2022
Filing Date:
September 14, 2018
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
C07F7/18; C07C381/12; C09K3/00; G03F7/004; G03F7/039; G03F7/20
Domestic Patent References:
| JP2006257078A | ||||
| JP2016130240A | ||||
| JP2016153881A | ||||
| JP2012224611A | ||||
| JP2009046479A | ||||
| JP2012193170A | ||||
| JP2012190001A | ||||
| JP2013080005A | ||||
| JP2008268744A | ||||
| JP2013129649A | ||||
| JP2009007327A | ||||
| JP2011090284A |
Attorney, Agent or Firm:
Toru Nakayama
Toru Sakamoto
Toru Sakamoto