Title:
METHOD FOR SYNTHESIZING DIAMOND USING COKE-OVEN GAS
Document Type and Number:
Japanese Patent JPH02164792
Kind Code:
A
Abstract:
PURPOSE:To stably and inexpensively obtain high-quality diamond by subjecting coke-oven gas added with gaseous hydrogen to the vapor-phase synthesis of diamond. CONSTITUTION:A part of the coke-oven gas generated from a coke-oven gas generator 1 is supplied to a line 2 and a flow rate controller 6. The remaining coke-oven gas is supplied to a gaseous hydrogen refiner 5, and refined. The obtained high-purity gaseous H2 is supplied to a flow rate controller 7 through a line 4 to control the C/H ratio of the gaseous hydrocarbon to gaseous H2 to 0.001-0.1, and a controlled gas is obtained. The controlled gas is then supplied to the vapor-phase diamond synthesis device 3 to form a diamond thin film, and the residual gas is returned to the generator 1 through a vacuum pump 8 and a gas return line 9.
Inventors:
KOBASHI KOJI
MIYATA KOICHI
KUMAGAI KAZUO
SUZUKI TOMIO
YOSHIGAE TAKEO
TATEMICHI HIDEO
TOMIMATSU FUMIO
MIYATA KOICHI
KUMAGAI KAZUO
SUZUKI TOMIO
YOSHIGAE TAKEO
TATEMICHI HIDEO
TOMIMATSU FUMIO
Application Number:
JP31764288A
Publication Date:
June 25, 1990
Filing Date:
December 15, 1988
Export Citation:
Assignee:
KOBE STEEL LTD
International Classes:
C30B29/04; (IPC1-7): C30B29/04
Attorney, Agent or Firm:
Yoshihiro Tsunoda
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