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Title:
METHOD FOR SYNTHESIZING HYPER BRANCHED POLYMER, HYPER BRANCHED POLYMER, RESIST COMPOSITION, SEMICONDUCTOR INTEGRATED CIRCUIT, AND METHOD FOR PRODUCING SEMICONDUCTOR INTEGRATED CIRCUIT
Document Type and Number:
Japanese Patent JP2008163104
Kind Code:
A
Abstract:

To provide a method for synthesizing a hyper branched polymer, by which the hyper branched polymer having a high branch degree can simply be synthesized in the presence of a reduced amount of a metal catalyst without deteriorating reactivity.

This method for synthesizing the hyper branched polymer is characterized by comprising the first process for polymerizing a living radically polymerizable monomer in the presence of the first metal catalyst to produce a core portion, the second process for introducing acid-decomposing groups into the core portion obtained in the first process, and the third process for decomposing a part of the acid-decomposing groups composing the shell in the hyper branched polymer formed in the second process with an acid catalyst to form acid groups, and adding a reducing agent together with the first and second metal catalysts in the first and second processes.


Inventors:
HORIBE MINEKO
UNO AKINORI
TANAKA YUIKO
Application Number:
JP2006352039A
Publication Date:
July 17, 2008
Filing Date:
December 27, 2006
Export Citation:
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Assignee:
LION CORP
International Classes:
C08F257/00; G03F7/039; H01L21/027
Attorney, Agent or Firm:
Akinori Sakai