MgO蒸着材およびその製造方法 - Mitsubishi Materials Corporation

Title:

MgO蒸着材およびその製造方法

Document Type and Number:

Japanese Patent JP5348194

Kind Code:

B2

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Inventors:

Hideaki Sakurai
Ginjiro Toyoguchi
Shoro Kuromitsu

Application Number:

JP2011162227A

Publication Date:

November 20, 2013

Filing Date:

July 25, 2011

Export Citation:

Assignee:

Mitsubishi Materials Corporation

International Classes:

C23C14/24; C04B35/653; H01J9/02; H01J11/22; H01J11/34; H01J11/40

Domestic Patent References:

Attorney, Agent or Firm:

Masatake Shiga
Tadashi Takahashi
Hiroshi Masui
Fumihiro Hosokawa

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