Title:
MICRO ACTUATOR, RELAY USING SAME, SPRING ADJUSTING ARRANGEMENT, OPTICAL SWITCH, MASSAGE MACHINE, AND FAILURE INSPECTION DEVICE
Document Type and Number:
Japanese Patent JP2004129348
Kind Code:
A
Abstract:
To provide an micro actuator used as a drive source for various devices without any mechanical coupling with an element to be driven, and to provide a relay using the same, a spring adjusting device, an optical switch, a massage machine, and a failure inspection device.
The micro actuator 10 is provided with an insulator layer 2 comprising a porous silicon layer provided on the upper surface of a crystal silicon semiconductor substrate 1, and a heating thin film 3 of an electrical resistor or a Peltier element formed on the surface of the insulator layer 2. It has a drive circuit 4 formed integrally on the rear surface side of the crystal silicon substrate 1 in a single chip structure.
Inventors:
AKETO KOUSHI
KITADA KOSAKU
TSUBAKI KENJI
KITADA KOSAKU
TSUBAKI KENJI
Application Number:
JP2002287778A
Publication Date:
April 22, 2004
Filing Date:
September 30, 2002
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
G01B17/02; B06B1/02; B81B3/00; G02B26/08; H01H61/04; H02N11/00; (IPC1-7): H02N11/00; B81B3/00; G01B17/02; G02B26/08
Attorney, Agent or Firm:
Keisei Nishikawa
Atsuo Mori
Atsuo Mori
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