Title:
MICRO-MECHANICAL OPTICAL SHUTTER
Document Type and Number:
Japanese Patent JPH07234366
Kind Code:
A
Abstract:
PURPOSE: To provide many small shutters and intermit light, place the shutter in either stepwise or continuous operation, and enables batch manufacture by using integrated circuit manufacture technology.
CONSTITUTION: A hole 12 penetrating a substrate 11 is formed by etching for each shutter 10. A rotator 13 which has at least one opening part is formed on the hole 12. When the rotator 13 rotates, radiant light passing through the hole 12 is selectively cut off or not cut off.
Inventors:
JIEFURII BII SANPUSERU
Application Number:
JP26773694A
Publication Date:
September 05, 1995
Filing Date:
October 31, 1994
Export Citation:
Assignee:
TEXAS INSTRUMENTS INC
International Classes:
G02B26/04; H01L21/027; H02N1/00; (IPC1-7): G02B26/04; H01L21/027
Attorney, Agent or Firm:
Akira Asamura (3 outside)