Title:
マイクロプラズマによる堆積方法及び装置
Document Type and Number:
Japanese Patent JP4565244
Kind Code:
B2
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Inventors:
Takeshi Sasaki
Sadaki Shimizu
Naoto Koshizaki
Kazuo Terashima
Sadaki Shimizu
Naoto Koshizaki
Kazuo Terashima
Application Number:
JP2008208924A
Publication Date:
October 20, 2010
Filing Date:
August 14, 2008
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
C23C14/24; B32B3/10; B32B15/08; H01L21/285
Domestic Patent References:
| JP2003328138A | ||||
| JP2003115650A | ||||
| JP11510855A |
Foreign References:
| US5874134 |
Other References:
DI FONZO F, GIDWANI A, FAN M H, NEUMANN D, IORDANOGLOU D I, HEBERLEIN J V R, TYMIAK N, GERBERICH W W, RAO N P,Focused nanoparticle-beam deposition of patterned microstructures,Appl Phys Lett,2000年 8月 7日,Vol.77, No.6 ,Page.910-912
M. SUZUKI, M. KAGAWA, Y. SYONO and T. HIRAI,THIN FILMS OF CHROMIUM OXIDE COMPOUNDSFORMED BY THE SPRAY-ICP TECHNIQUE,Journal of Crystal Growth,1990年,Vol.99,p.611-615
M. SUZUKI, M. KAGAWA, Y. SYONO and T. HIRAI,THIN FILMS OF CHROMIUM OXIDE COMPOUNDSFORMED BY THE SPRAY-ICP TECHNIQUE,Journal of Crystal Growth,1990年,Vol.99,p.611-615
Attorney, Agent or Firm:
Isamu Ogoshi