Title:
MICROWAVE PLASMA DEVICE
Document Type and Number:
Japanese Patent JP3516097
Kind Code:
B2
Abstract:
PURPOSE: To prevent the deformation or breakage due to thermal expansion of an adhesion preventing cylinder in a microwave plasma device having a prescribed configuration and improve the reproducibility of plasma treatment by holding the adhesion preventing cylinder by a specified means.
CONSTITUTION: This microwave plasma device has a plasma generating chamber 3, a microwave guide window 2 for guiding a microwave into the plasma generating chamber 3, and an adhesion preventing cylinder 7 for covering the inner wall of the plasma generating chamber 3 provided on the inner part of the plasma generating chamber 3. In this device, the lower end of the adhesion preventing cylinder 7 is held by an elastic adhesion preventing cylinder holding means 8 to make the clearance between the adhesion preventing cylinder 7 and the microwave guide window 3 constant. Consequently, the removal and replacement of the adhesion preventing cylinder 7 are also facilitated.
Inventors:
Kamata, Kyoko
Goto, Katsufumi
Goto, Katsufumi
Application Number:
JP32703194A
Publication Date:
April 05, 2004
Filing Date:
December 28, 1994
Export Citation:
Assignee:
SUMITOMO METAL IND LTD
International Classes:
H05H1/46; C23F4/00; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): H05H1/46; C23F4/00; H01L21/205; H01L21/3065
Attorney, Agent or Firm:
河野 登夫