To provide a minienvironment device capable of effectively utilizing circulated flow, and keeping high cleaning level in the device while reducing load on a filter or the like.
This minienvironment device to achieve this subject, comprises a sensor means 20 for sensing a cleaning level in an intermediate chamber 24, a shielding plate 34 for adjusting the amount of gas to be cleaned again through a circulation passage 36, and a control means 38 for determining a cleaning level estimated when an outside gas is cleaned and taken in the intermediate chamber 24 as a threshold value, comparing the threshold value with a sensing value by the sensor means 20, and controlling the shielding plate 34 to lower a flow rate of the circulated flow when the sensing value is over the threshold value.
KASHIRAJIMA YASUHIRO
SUGIURA TAKUMI
Okubo Misao
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