Title:
MONOLITHIC THIN FILM RESONATOR GRATING FILTER AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JP3953554
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a simple, inexpensively producible and highly reliable thin film piezo-resonator grating filter and its formation method.
SOLUTION: The monolithic thin film resonator grating filter 30 includes separates strips 42, 43 for a conductive film arranged on a substrate 10 and capable of regulating a 1st I/O terminal set, a piezo-electric substance layer arranged on the conductive film and separated conductive strips 40, 41, arranged on the piezo-electric layer so as to respectively intersect with the 1st strips 42, 43 and forming intersecting area for regulating respective thin film resonators 35 to 38 and a 2nd I/O terminal set. When mass load is applied to the resonators 36, 37 by arranging plural dielectric films 27 on selected intersecting areas, resonance frequency is reduced.
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Inventors:
Luke Man
Fred S. Hitkernel
Robert G. Kinsman
Fred S. Hitkernel
Robert G. Kinsman
Application Number:
JP21810896A
Publication Date:
August 08, 2007
Filing Date:
August 01, 1996
Export Citation:
Assignee:
Freescale Semiconductor, Inc.
International Classes:
H03H9/17; H03H3/02; H03H3/04; H03H9/00; H03H9/56; (IPC1-7): H03H9/17; H03H3/02
Domestic Patent References:
| JP61127216A | ||||
| JP61218215A | ||||
| JP62266906A | ||||
| JP63082116A | ||||
| JP60126907A |
Attorney, Agent or Firm:
Mamoru Kuwagaki