Title:
マウントフランジ端面状態確認治具
Document Type and Number:
Japanese Patent JP6792462
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a jig which can easily confirm a flatness of an annular end surface of a mount flange.SOLUTION: A mount flange end surface state confirmation jig 3 is used for confirming a state of an annular end surface 611a of a mount flange 61 comprising a boss part 610 which is provided at a tip of a spindle and is fitted to a blade, and a flange part 611 which is so formed as to be projected radial direction outwards from a rear end of the boss part 610, has the annular end surface 611a on a front face, and comprises an annular recess 611b between an inner peripheral side of the annular end surface 611a and the boss part 610. The jig comprises: a body 30 which has a face 304 which contacts the whole area of the annular end surface 611a and on which a hole 305, in which the boss part 610 is accommodated, is formed; and means 31 for detecting presence or absence of leakage of air from the annular end surface 611a and the contact face 304. An opening 306, which is formed at a position corresponding to the annular recess 611b, and a suction passage 307, whose one end is communicated with the opening 306 and the other end is connected to a suction source 308, are form on the body 30.SELECTED DRAWING: Figure 2
Inventors:
Satoshi Hanashima
Application Number:
JP2017006533A
Publication Date:
November 25, 2020
Filing Date:
January 18, 2017
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B49/08; B23Q17/00; B23Q17/20; B24B45/00; H01L21/301
Domestic Patent References:
| JP201523222A | ||||
| JP2010284774A |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office