PURPOSE: To obtain an electrophotographic sensitive body without causing white dots or picture running even when a picture is formed at a high speed by changing the frequency of an electromagnetic wave from the RF zone to the VHF zone from the start of film formation until the end of film formation.
CONSTITUTION: An electrophotographic sensitive body is produced by CVD. In this case, a raw gas is decomposed by an electromagnetic wave in a film forming chamber to form at least a photoconductive layer and a surface layer successively on a conductive substrate while changing the frequency of the electromagnetic wave from the RF zone to the VHF zone from the start of film formation until the end of film formation. The RF zone is controlled to be 5-20MHz, preferably to be 9-14MHz, and the VHF zone is controlled to be 20-450MHz, preferably to be 50-250MHz. A globular protrusion attributable to the DC component in the film formation and white dots are generated when the frequency of the electromagnetic wave is controlled to be <5MHz, and the structure in the film is disordered and a good quality is not attained when the frequency is >450MHz.
NIINO HIROAKI
YAMAZAKI KOJI
UEDA SHIGENORI
EBARA TOSHIYUKI
