Title:
VACUUM TREATING DEVICE
Document Type and Number:
Japanese Patent JP2511363
Kind Code:
B2
Abstract:
PURPOSE: To provide a vacuum treatment device by which a trouble in the time of day-to-day operation is prevented.
CONSTITUTION: In a vacuum treating device consisting of a vacuum producing device 1, a vacuum pump 2 installed communicatingly with the device and a dry detoxifying device 3 for treating waste gas sucked by the vacuum pump, an atmospheric contaminant sensor 12 is arranged in inlet piping 7 of the wet detoxifying device, The atmospheric contaminant sensor 12 is an oxygen concentration meter or moisture meter and the vacuum treating device is preferably equipped with a mechanism for stopping of feeding a process gas 16 to the vacuum production device which is operated by an output signal of the atmospheric contaminant sensor, devices 17, 18 for causing diluting gaseous N2 to flow into sucked gas and a mechanism 5 for opening a bypass valve of the dry detoxifying device for the waste gas.
Inventors:
OOSATO MASAAKI
TSUJIMURA MANABU
FUKUNAGA AKIRA
TSUJIMURA MANABU
FUKUNAGA AKIRA
Application Number:
JP20015492A
Publication Date:
June 26, 1996
Filing Date:
July 06, 1992
Export Citation:
Assignee:
EBARA SEISAKUSHO KK
EBARA SOGO KENKYUSHO KK
EBARA SOGO KENKYUSHO KK
International Classes:
B01D53/34; B01J3/02; C23C16/44; H01L21/302; H01L21/3065; (IPC1-7): B01J3/02; B01D53/34; C23C16/44; H01L21/3065
Domestic Patent References:
| JP63141321A | ||||
| JP240492A | ||||
| JP645639U |
Attorney, Agent or Firm:
Katsura Yoshimine (1 person outside)