Title:
【考案の名称】バキュ―ム台排気装置
Document Type and Number:
Japanese Patent JP2500445
Kind Code:
Y2
Inventors:
Kunio Nukii
Yoshihiro Ishiwata
Yoshimiya Issei
Yoshihiro Ishiwata
Yoshimiya Issei
Application Number:
JP9361891U
Publication Date:
June 05, 1996
Filing Date:
October 21, 1991
Export Citation:
Assignee:
Juki Co., Ltd.
International Classes:
D06F81/08; D06F71/34; D06F81/10; (IPC1-7): D06F81/08; D06F71/34
Domestic Patent References:
| JP6429299A | ||||
| JP6468300A |
Attorney, Agent or Firm:
Seiichi Sawaki
Previous Patent: JPH02500444
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