Title:
NANOWIRE CROSSLINKING DEVICE UTILIZABLE FOR SHAPE MEASUREMENT OF ELECTRON BEAM
Document Type and Number:
Japanese Patent JP2008256526
Kind Code:
A
Abstract:
To provide a nanowire crosslinking device capable of measuring the shape of a fine electron beam by a simple method, its forming method, and an electron beam shape measuring method applying the device.
In the forming method of the nanowire crosslinking device, a nanowire, for example, a carbon nanotube, is arranged so as to cross a metal plate, and both end parts of the nanowire are fixed to the metal plate. The nanowire crosslinking device has the nanowire installed so as to cross the metal plate.
Inventors:
SUGA HIROSHI
SHIMIZU TETSUO
TOKUMOTO HIROSHI
SHIMIZU TETSUO
TOKUMOTO HIROSHI
Application Number:
JP2007098930A
Publication Date:
October 23, 2008
Filing Date:
April 04, 2007
Export Citation:
Assignee:
NAT INST OF ADV IND & TECHNOL
UNIV HOKKAIDO
UNIV HOKKAIDO
International Classes:
B82B1/00; G01T1/29; B82B3/00; G21K5/04; H01J37/04; H01L21/027
Attorney, Agent or Firm:
Toshizo Iida
Wataru Sasaki
Naosuke Miyamae
Wataru Sasaki
Naosuke Miyamae