Title:
近接場光学顕微鏡及びそれを用いた偏光評価方法
Document Type and Number:
Japanese Patent JP4096060
Kind Code:
B2
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Inventors:
Tadashi Mitsui
Hidetoshi Oikawa
Takashi Sekiguchi
Hidetoshi Oikawa
Takashi Sekiguchi
Application Number:
JP2004090613A
Publication Date:
June 04, 2008
Filing Date:
March 25, 2004
Export Citation:
Assignee:
National Institute for Materials Science
International Classes:
G01Q10/04; G01Q60/06; G01Q60/18; G01Q60/22; G01Q60/24; G02B21/06
Domestic Patent References:
| JP5180756A | ||||
| JP2000249646A | ||||
| JP2004012427A | ||||
| JP10221353A | ||||
| JP2001165843A |
Other References:
S. Bourzeix, J. Moison, F. Mignard, F. Barthe,Near-field optical imaging of light propagation in semiconductor waveguide structures,APPLIED PHYSICS LETTERS,1998年 8月24日,Vol. 73, No. 8,pp. 1035-1037
Kunio Nakajima, Yasuyuki Mitsuoka, Norio Chiba, Hiroshi Muramatsu, Tatsuaki Ataka, Katsuaki Sato, Masamichi Fujihira,Polarization effect in scanning near-field optic/atomic-force microscopy (SNOM/AFM),Ultramicroscopy,1998年 3月 1日,Vol.71, Issue 1-4,pp.257-262
X. Borrise, D. Jimenez, N. Barnoil, F. Perez-Murano, X. Aymerich,scanning Near-Field Optical Microscope for the Characterization of Optical Integrated Waveguides,Journal of Lightwave Technology,2000年 3月 3日,Vol.18, No.3,pp.370-374
A. L. Campillo, J. W. P. Hsu, C. A. White and C. D. W. Jones,Direct measurement of the guided modes in LiNbO3 waveguides,Appl. Phys. Lett.,2002年 4月 1日,Vol.80, No.13,pp.2239-2241
S. Tascu, P. Moretti, S. Kostritskii, B. Jacquier,Optical near-field measurements of guided modes in various processed LiNbO3 and LiTaO3 channel waveguides,OPTICAL Materials,2003年,Vol.24,pp.297-302
Kunio Nakajima, Yasuyuki Mitsuoka, Norio Chiba, Hiroshi Muramatsu, Tatsuaki Ataka, Katsuaki Sato, Masamichi Fujihira,Polarization effect in scanning near-field optic/atomic-force microscopy (SNOM/AFM),Ultramicroscopy,1998年 3月 1日,Vol.71, Issue 1-4,pp.257-262
X. Borrise, D. Jimenez, N. Barnoil, F. Perez-Murano, X. Aymerich,scanning Near-Field Optical Microscope for the Characterization of Optical Integrated Waveguides,Journal of Lightwave Technology,2000年 3月 3日,Vol.18, No.3,pp.370-374
A. L. Campillo, J. W. P. Hsu, C. A. White and C. D. W. Jones,Direct measurement of the guided modes in LiNbO3 waveguides,Appl. Phys. Lett.,2002年 4月 1日,Vol.80, No.13,pp.2239-2241
S. Tascu, P. Moretti, S. Kostritskii, B. Jacquier,Optical near-field measurements of guided modes in various processed LiNbO3 and LiTaO3 channel waveguides,OPTICAL Materials,2003年,Vol.24,pp.297-302