Title:
NEGATIVE ION SOURCE AND NEGATIVE ION GENERATION METHOD
Document Type and Number:
Japanese Patent JP2023119144
Kind Code:
A
Abstract:
To provide a negative ion source and a negative ion generation method that can achieve high negative ion generation efficiency.SOLUTION: A housing 108 includes: an introduction port 106 that introduces a sample; a plasma generation region 113 that communicates with the introduction port 106 and generates plasma by electric discharge; a negative ion generation region 114 in which particles dissociated or excited by the reaction between the generated plasma and the sample are negatively ionized; and a draw-out port 107 that communicates with the negative ion generation region 114 and draws out the generated negative ions to the outside. The negative ion generation region 114 is filled with a thermoelectron emitting substance 116 that generates thermoelectron by high-frequency heating.SELECTED DRAWING: Figure 2
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Inventors:
MATSUBARA AKIHIRO
KOKUBU YOKO
KOKUBU YOKO
Application Number:
JP2022021830A
Publication Date:
August 28, 2023
Filing Date:
February 16, 2022
Export Citation:
Assignee:
JAPAN ATOMIC ENERGY AGENCY
International Classes:
H01J27/08; H01J37/08
Attorney, Agent or Firm:
Patent Attorney Corporation Hiraki International Patent Office