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Title:
ネガ型感光性樹脂組成物およびそれを用いた硬化膜
Document Type and Number:
Japanese Patent JP7119390
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a negative type photosensitive resin composition providing a cured film which is excellent in pattern workability and storage stability and has high strength and high chemical resistance by UV curing and thermosetting.SOLUTION: A negative type photosensitive resin composition contains (A) an alkali soluble resin having a carboxylic group, (B) a photoradical polymerization initiator, (C) an epoxy or oxetane-containing monofunctional monomer having a specific structure, (D) an amine-based silane coupling agent having a specific structure and (E) a solvent having an alcoholic hydroxyl group, where (A) the alkali soluble resin having the carboxylic group contains (a-1) polysiloxane having a carboxyl group and a radical polymerizable group and/or (a-2) a modified acrylic resin being a reaction product of an acrylic resin having a carboxyl group and a mono-substituted epoxy compound having a radical polymerizable group, and the resin composition contains 25-70 wt.% of (E) the solvent having the alcoholic hydroxyl group.SELECTED DRAWING: None

Inventors:
Masaru Fukuhara
Masahide Senoo
Yasuhiro Kami
Application Number:
JP2018013233A
Publication Date:
August 17, 2022
Filing Date:
January 30, 2018
Export Citation:
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Assignee:
TORAY INDUSTRIES,INC.
International Classes:
G03F7/027; G02B1/14; G02B5/20; G03F7/004; G03F7/031; G03F7/038; G03F7/075; G06F3/041
Domestic Patent References:
JP2007199685A