Title:
窒化物圧電体およびそれを用いたＭＥＭＳデバイス
Document Type and Number:
Japanese Patent JP7406262
Kind Code:
B2
Abstract:
An object is to provide a piezoelectric body having a value indicating a higher performance index (d33, e33, C33, g33, and/or k2) than aluminum nitride not doped with any element. The piezoelectric body is represented by a chemical formula Al1-X-YMgXMYN where X + Y is less than 1, X is in a range of more than 0 and less than 1, and Y is in a range of more than 0 and less than 1.
Inventors:
Kenji Hirata
Hiroshi Yamada
Masato Uehara
Angaraini pickpocket sweetfish
Morito Akiyama
Hiroshi Yamada
Masato Uehara
Angaraini pickpocket sweetfish
Morito Akiyama
Application Number:
JP2021501655A
Publication Date:
December 27, 2023
Filing Date:
December 27, 2019
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
H10N30/853; C30B29/38; H10N30/20; H10N30/30
Domestic Patent References:
| JP2006124268A | ||||
| JP2013148562A | ||||
| JP2015233042A |
Foreign References:
| WO2016111280A1 |
Attorney, Agent or Firm:
Takayuki Takamatsu
Noriko Suzuki
Noriko Suzuki