Title:
不揮発性半導体記憶装置及びその製造方法
Document Type and Number:
Japanese Patent JPWO2008126177
Kind Code:
A
Inventors:
Kazuhiro Mizutani
Application Number:
JP2007055073W
Publication Date:
October 23, 2008
Filing Date:
March 14, 2007
Export Citation:
Assignee:
FUJITSU microelectronics incorporated company
International Classes:
H01L27/10; H01L27/115; H01L29/792; H01L21/8247; H01L29/788
Attorney, Agent or Firm:
Haruhiko Mimura
Kitano Yoshito
Kitano Yoshito