Title:
OPTICAL DEVICE COMPRISING RASTER ELEMENT, AND IRRADIATION SYSTEM COMPRISING THE OPTICAL DEVICE
Document Type and Number:
Japanese Patent JP2007150295
Kind Code:
A
Abstract:
To provide an optical device allowing an irradiation surface to change its position, with no complex and expensive system required for projecting an intermediate field surface in which a field aperture stop is arranged.
The optical device comprises a first optical element (100) equipped with at least one first raster element (102) comprising a first axis (110), and a second optical element (104) equipped with at least one second raster element (106) comprising a second axis (112). The first raster element can change its position relative to the second raster element so that the distance between the first axis and the second axis is variable.
Inventors:
SINGER WOLFGANG
DEGUENTHER MARKUS
WANGLER JOHANNES
BURGURT MECKING
DEGUENTHER MARKUS
WANGLER JOHANNES
BURGURT MECKING
Application Number:
JP2006304598A
Publication Date:
June 14, 2007
Filing Date:
November 09, 2006
Export Citation:
Assignee:
ZEISS CARL SMT AG
International Classes:
H01L21/027; G02B13/00; G02B17/08; G03F7/20
Attorney, Agent or Firm:
Kazuko Fujita