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Title:
Optical imager and method
Document Type and Number:
Japanese Patent JP6305969
Kind Code:
B2
Abstract:
There is provided an optical imaging device, in particular for microlithography, comprising at least one optical element and at least one holding device associated to the optical element (109), wherein the holding device holds the optical element and a first part (109.1) of the optical element contacts a first atmosphere and a second part (109.2) of the optical element at least temporarily contacts a second atmosphere. There is provided a reduction device at least reducing dynamic fluctuations in the pressure difference between the first atmosphere and the second atmosphere.

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Inventors:
Stephan Hembacher
Bernhard Gerrich
Jens Kgler
Application Number:
JP2015230231A
Publication Date:
April 04, 2018
Filing Date:
November 26, 2015
Export Citation:
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Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G03F7/20; G02B7/02
Domestic Patent References:
JP11154636A
JP11154644A
JP2005136404A
JP2005197698A
JP60239023A
Foreign References:
WO2005101121A2
WO2006009573A1
Attorney, Agent or Firm:
Kenji Sugimura
Groundwork Kenichi



 
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