PURPOSE: To suppress the vibration of an object to be vibrated even when the looseness and friction, etc., exist in the mechanical system to be controlled, a non-linear element exists also in a servo system and a modeling is not exactly performed, by adding specific controlled variable.
CONSTITUTION: A laser displacement gauge 4 detects the displacement X1 of a flexible structure 1, it is made speed X'1 by the displacement X1 and a differential circuit 6 and it is added to an A/D converter 9. A laser displacement gauge 5 detects the stroke amount X2 of a rod 3a of a hydraulic actuator 3, it is made speed X'2 by the stroke amount X2 and a differential circuit 7 and it is added to an A/D converter 9. In the A/D converter 9, these which are inputted are converted into digital signals and are added to a manipulated variable calculation part 10. The calculation part 10 calculates a driving signal uc driving the actuator 3, an optinum damping orbit command signal preparing part 12 calculates a driving signal u, these are added to a D/A converter 10, they are amplified in an amplifier 11, and they are added as the driving signals to an actuator 13.
ITO HIROYUKI
MITSUTA SHINJI