Title:
ORGANIC EL DEVICE MANUFACTURING APPARATUS AND ORGANIC EL DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2013247040
Kind Code:
A
Abstract:
To provide an organic EL device manufacturing apparatus and an organic EL device manufacturing method which are capable of performing vapor deposition with high definition by preventing blurring due to a mask.
In the organic EL device manufacturing method of the present invention according to which an organic EL device is manufactured by vapor-depositing a vapor deposition material on a substrate via a mask having a predetermined vapor deposition pattern, the vapor deposition is performed by pressing predetermined interval portions at which the predetermined vapor deposition pattern is formed in a predetermined interval.
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Inventors:
WAKABAYASHI MASA
KATO NOBORU
YUMIBA KENJI
ZUSHI AN
KATO NOBORU
YUMIBA KENJI
ZUSHI AN
Application Number:
JP2012121433A
Publication Date:
December 09, 2013
Filing Date:
May 29, 2012
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H05B33/10; C23C14/04; H01L51/50
Attorney, Agent or Firm:
Polaire Patent Business Corporation