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Patent Searching and Data


Title:
OXIDE ELEMENT AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPH08162684
Kind Code:
A
Abstract:

PURPOSE: To give the conditions of a temperature and a pressure for forming a thin film capable of growing in the orientation relation of a cube on cube in which an SrTiO3 layer is on an MgO plane (001) in a board structure in which the SrTiO3 layer is formed on a single crystalline surface of the MgO (001).

CONSTITUTION: An orientation of cube on cube is obtained on a hatched temperature-pressure area 11, an orientation (110) is mainly grown in a region 12, and an orientation (111) is mainly grown in a region 13. Accordingly, a low-cost perovskite structure board having a large area is given with suitable thin film growth of an oxide superconductor, a ferroelectric element, etc.


Inventors:
HIRATANI MASAHIKO
IMAGAWA KAZUSHIGE
Application Number:
JP30181394A
Publication Date:
June 21, 1996
Filing Date:
December 06, 1994
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H01L39/22; (IPC1-7): H01L39/22
Attorney, Agent or Firm:
Ogawa Katsuo