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Title:
OXIDE SINTERED COMPACT, TARGET, OXIDE TRANSPARENT CONDUCTIVE FILM OBTAINED BY USING THE SAME AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2007314364
Kind Code:
A
Abstract:

To provide an oxide sintered compact which is substantially composed of tin, zinc and oxygen, to provide a target for sputtering or ion plating which dose not occur crack even if high DC power is applied, to provide an oxide transparent conductive film which is excellent in chemical resistance and has an amorphous structure, and to provide a manufacturing method which can form the oxide transparent film at high speed in high productivity.

The oxide sintered compact, which is substantially composed of tin, zinc and oxygen, contains zinc so that the ratio Zn/(Zn+Sn) of the number of atoms is 0.05-0.48, and is mainly composed of a zinc stannate compound phase and a tin oxide phase. The target is obtained by processing the oxide sintered compact. The transparent conductive film is formed on a substrate by using the target by a sputtering or ion plating process.

COPYRIGHT: (C)2008,JPO&INPIT


Inventors:
ABE TAKAYUKI
NAKAYAMA NORIYUKI
Application Number:
JP2006144001A
Publication Date:
December 06, 2007
Filing Date:
May 24, 2006
Export Citation:
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Assignee:
SUMITOMO METAL MINING CO
International Classes:
C04B35/457; C23C14/34; H01B5/14; H01B13/00
Domestic Patent References:
JP2000256060A2000-09-19
JP2006196200A2006-07-27
JP2000256059A2000-09-19
Attorney, Agent or Firm:
Kenji Kawabi