Title:
OXIDE SUPERCONDUCTING THIN FILM
Document Type and Number:
Japanese Patent JPH02255521
Kind Code:
A
Abstract:
PURPOSE: To obtain an n-type superconducting thin film using electrons as carriers and applicable to a novel electronic device by using an Nd2CuO4 type multiple oxide contg. specified elements.
CONSTITUTION: An oxide represented by a formula (A1-xBx)zCuyO (where A is Pr, Nd, Pm, Sm, Eu, Gd or Er, E is an element maintaining the fundamental crystal structure and having ≥+3 valence oxidation number, e.g. Ce, Th, Tl, Pb or Bi, x is 0.02-0.20, preferably 0.07-0.1 and y is 3.5-4.0) is molded and calcined to form an oxide target. An oxide superconducting thin film is produced on a substrate by sputtering with the oxide target.
Inventors:
SAITO SHINICHIRO
HIRATANI MASAHIKO
FUKAZAWA TOKUMI
AKAMATSU SHOICHI
MIYAUCHI KATSUMI
HIRATANI MASAHIKO
FUKAZAWA TOKUMI
AKAMATSU SHOICHI
MIYAUCHI KATSUMI
Application Number:
JP7512689A
Publication Date:
October 16, 1990
Filing Date:
March 29, 1989
Export Citation:
Assignee:
HITACHI LTD
International Classes:
C01G3/00; C01G1/00; C23C14/08; H01B12/06; H01L39/02; (IPC1-7): C01G3/00; C23C14/08; H01B12/06; H01L39/02
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)
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