Title:
PATTERN IMAGE PROCESSING DEVICE AND IMAGE PROCESSING METHOD
Document Type and Number:
Japanese Patent JP3490490
Kind Code:
B2
Abstract:
PURPOSE: To easily and quickly perform the specification and recognition of an individual pattern by using a universal processor by detecting a specific pattern provided with an area value nearest to that of a reference image from repeating patterns image-picked up by a scanning type electronic microscope.
CONSTITUTION: The SEM image of the scanning type electronic microscope is inputted to an image processing device 10 via an input terminal 2 as a multi- level image (11), and spatial filtering processing (12) is applied to it, and the smoothing processing of the image is performed. Thence, histogram processing (13) is performed, and object image data is made into a graph classified by every density. Thence, a threshold value (14) is found from histogram data, and ternary coding processing (15) is performed by a found threshold value. In other words, for example, the hole pattern of the SEM image is separated to a pattern surface part, a pattern tapered part, and a pattern bottom part by ternary coding. Thence, after noise elemination (166 is performed, labelling and area calculation processing (17) is performed on each pattern. Finally, it is compared (19) with a reference area value.
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Inventors:
Grain Saki Koji
Hiroshi Motoki
Bunro Komatsu
Hiroshi Motoki
Bunro Komatsu
Application Number:
JP871194A
Publication Date:
January 26, 2004
Filing Date:
January 28, 1994
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G03F1/84; G03F1/86; G06K9/00; G06T1/00; G01B11/24; G06T5/00; G06T5/20; G06T7/60; (IPC1-7): G06T1/00; G01B11/24; G03F1/08; G06T7/60
Domestic Patent References:
| JP5307609A | ||||
| JP560537A |
Attorney, Agent or Firm:
Kazuo Sato (3 others)