Title:
光電子増倍管及びその製造方法
Document Type and Number:
Japanese Patent JP7069268
Kind Code:
B2
Abstract:
An internal portion of a photomultiplier tube (PMT) having a reflective photocathode array, and a method for manufacturing the same, are provided. The internal portion of the PMT comprises the reflective photocathode array and at least one dynode structure corresponding to the array of reflective photocathodes. Each reflective photocathode receives light and from the light, generates photoelectrons which then travel towards the at least one dynode structure. Upon the photoelectrons making contact with the at least one dynode structure, the photoelectrons are multiplied.
Inventors:
McKay Derek
Application Number:
JP2020167264A
Publication Date:
May 17, 2022
Filing Date:
October 01, 2020
Export Citation:
Assignee:
KLA Corporation
International Classes:
H01J43/08; H01J1/34; H01J43/20
Domestic Patent References:
| JP6150876A | ||||
| JP5159740A |
Foreign References:
| US5481158 |
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office