Title:
PHOTORESIST POLYMER COMPOUND FOR LIQUID IMMERSION AND COMPOSITION
Document Type and Number:
Japanese Patent JP2009197184
Kind Code:
A
Abstract:
To provide a photoresist polymer compound for liquid immersion exposure which can form a resist film having excellent water resistance, a photoresist resin composition for liquid immersion exposure, a photoresist resin composition for liquid immersion exposure which can clearly and accurately form a fine pattern, and a method for producing a semiconductor.
The photoresist polymer compound for liquid immersion comprises 0.1-10%, in the molar ratio, of at least one monomer unit having a 5-20C alicyclic skeleton, which contains 6-15 atoms bonded in a straight-chain form from the carbon atom of the main chain of the polymer, and may contain a fluorine atom at the terminal atom of the straight-chain atom.
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Inventors:
ARAI TAKASHI
ITOKAZU TERUO
ITOKAZU TERUO
Application Number:
JP2008042821A
Publication Date:
September 03, 2009
Filing Date:
February 25, 2008
Export Citation:
Assignee:
DAICEL CHEM
International Classes:
C08F20/26; G03F7/039; H01L21/027
Domestic Patent References:
JPS6153242A | 1986-03-17 | |||
JP2000212127A | 2000-08-02 | |||
JP2001166463A | 2001-06-22 | |||
JP2001271069A | 2001-10-02 | |||
JP2003223001A | 2003-08-08 | |||
JP2005352466A | 2005-12-22 | |||
JP2007249192A | 2007-09-27 | |||
JP2003327628A | 2003-11-19 | |||
JP2005331918A | 2005-12-02 | |||
JPS6153242A | 1986-03-17 | |||
JP2000212127A | 2000-08-02 | |||
JP2001166463A | 2001-06-22 | |||
JP2001271069A | 2001-10-02 | |||
JP2003223001A | 2003-08-08 | |||
JP2005352466A | 2005-12-22 | |||
JP2007249192A | 2007-09-27 |
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