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Title:
PHOTOSENSITIVE POLYMER COMPOSITION
Document Type and Number:
Japanese Patent JP2003131372
Kind Code:
A
Abstract:

To easily obtain a polyimide film having good suitability to leveling of wiring steps and embedding of a fine groove pattern and capable of forming a pattern by the conventional known processing of a photosensitive polymer composition.

A photosensitive polymer composition is provided which comprises 100 pts.wt. polyimide resin precursor obtained by adding 2.0-4.0 mole ≤4C monohydric alcohol to 1 mole aromatic tetrabasic acid dianhydride in the presence of a solvent, heating these to convert part or all of the tetrabasic acid dianhydride to diester and reacting these with 0.1-1.0 mole amine compound of formula (I) (where R1 is an aromatic cyclic group; R2 is H or methyl and n is 1-3) in such an amount as to make the total amount of amine compounds 0.9-1.1 mole and 0.1-100 pts.wt. acrylic acid and/or methacrylic acid.


Inventors:
UEDA ATSUSHI
Application Number:
JP2001330980A
Publication Date:
May 09, 2003
Filing Date:
October 29, 2001
Export Citation:
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Assignee:
HITACHI CHEM DUPONT MICROSYS
International Classes:
G03F7/027; C08F2/44; C08F283/04; C08G73/12; H01L21/027; (IPC1-7): G03F7/027; C08F2/44; C08F283/04; C08G73/12; H01L21/027