Title:
感光性樹脂組成物、感光性樹脂積層体およびパターン形成方法
Document Type and Number:
Japanese Patent JP5279353
Kind Code:
B2
Inventors:
Masaki Saki
Tetsuya Kato
Tetsuya Kato
Application Number:
JP2008151089A
Publication Date:
September 04, 2013
Filing Date:
June 09, 2008
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/032; C08F2/44; G03F7/004; G03F7/031; G03F7/075; H05K3/28
Domestic Patent References:
| JP2008129463A | ||||
| JP10316721A | ||||
| JP2006308960A | ||||
| JP2007101763A |
Attorney, Agent or Firm:
Sakaki Morishita
Takeshi Aoki
Takeshi Aoki