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Title:
感光性樹脂組成物
Document Type and Number:
Japanese Patent JP4352524
Kind Code:
B2
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Inventors:
Koji Baba
Hozumi Shigeo
Application Number:
JP26393399A
Publication Date:
October 28, 2009
Filing Date:
September 17, 1999
Export Citation:
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Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/033; H01L21/027; G02B5/20; G03F7/00; G03F7/004; G03F7/027; G03F7/105
Domestic Patent References:
JP11100529A
JP9003134A
JP8151415A
JP7191462A
JP5255447A
JP10231326A
JP10073918A
JP2000338658A
JP2000214580A
JP38025036B1
Attorney, Agent or Firm:
Toru Nakayama



 
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