Title:
PHYSICAL QUANTITY SENSOR, PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOBILE BODY
Document Type and Number:
Japanese Patent JP2015184046
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a physical quantity sensor capable of improving an S/N ratio even if its size is reduced, and a pressure sensor, an altimeter, an electronic apparatus, and a mobile body which have the physical quantity sensor.SOLUTION: A physical quantity sensor 1 includes: a plurality of diaphragm parts 64 which are bent and deformed by receiving pressure; and a plurality of piezoresistive elements 7 which are provided to the diaphragm parts 64 different from each other and which are electrically connected in series. The plurality of piezoresistive elements 7 compose a bridge circuit.
Inventors:
TAKEUCHI JUNICHI
KINUGAWA TAKUYA
KINUGAWA TAKUYA
Application Number:
JP2014058505A
Publication Date:
October 22, 2015
Filing Date:
March 20, 2014
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01L9/00; H01L29/84
Domestic Patent References:
| JP2006071501A | 2006-03-16 | |||
| JPS60100475A | 1985-06-04 |
Foreign References:
| US7806001B1 | 2010-10-05 |
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi
Kazuo Asahi