To provide the structure of a piezoelectric acoustic converter which has a high vibration level in an audible zone while employing a piezoelectric system capable of being driven with low power consumption and can be made into an extremely small shape, and to provide a manufacturing method thereof.
The acoustic converter has a substrate 1 having a recess 12 on one surface and a cavity 10a adjacently provided on the other surface, and one part of the substrate 1 formed with the recess 12 is used as a first vibrator 2. The acoustic converter has an actuator 6 formed by forming a first conductive layer 3 on the first vibrator 2, forming a piezoelectric layer 4 on the first conductive layer 3, and forming a second piezoelectric layer 5 on the piezoelectric layer 4; one or more through holes 11 at a portion on the first vibrator 2 where the actuator 6 is not formed; and a second vibrator 8a having a through hole 9a at the top surface of the cavity 10a.
NAKATANI MASAYA
TERADA JIRO
Tomoyasu Sakaguchi
Hiroki Naito
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