To realize a piezoelectric actuator, suitable for size and weight reduction and advantageous in aspects of mechanical durability and manufacturing cost, with which a large object, such as an imaging element, can be driven in a predetermined direction with high output, without being accompanied by rotational deviation and a large amount of movement can be ensured.
Intersection units, each comprising a pair of bimorph piezoelectric elements (21a, 21b and 21c, 21d) intersecting in X-shape, are stacked in two stages (even-numbered stages) and are secured mutually thus obtaining a piezoelectric actuator having a balanced mechanical structure. An imaging element 11 is stably supported by two movable ends (C-1, C-2) at the tip of the piezoelectric actuator.
JPS60147926 | MAGNETIC HEAD DRIVE ELEMENT |
JPH11136972 | ULTRASONIC DRIVER |
JP3345521 | [Title of Invention] Friction Material for Ultrasonic Motor |
Toshimitsu Ichikawa
Kimihide Hashimoto
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