To ensure desired piezoelectric performance by forming an electromechanical converting element on the surface of an elastic body through thermal spraying and forming a highly conductive oxide layer between the elastic body and the electromechanical converting element.

In order to form a piezoelectric body layer 5 on an elastic body 3, a highly conductive oxide film, such as a ruthenium oxide layer 4, is formed on the elastic body by sputtering. A piezoelectric body layer 5, composed of lead zirconatetitanate(PZT), for example, is formed on the surface of the ruthenium oxide layer 4 using a plasma-spraying system. Thus, the ruthenium oxide layer 4 having high conductivity is formed between the elastic body 3 and the piezoelectric body layer 5. As a result, even if layer formation or heat treatment is performed at high temperature, no insulating layer of low permittivity is produced on the surface of the ruthenium oxide layer 4 as the lower electrode, and it is possible to sufficiently ensure the performance of the piezoelectric body layer 5.