Title:
圧電素子およびその製造方法
Document Type and Number:
Japanese Patent JP6899238
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric element in which an appropriate opening for making contact with a first electrode can be formed in a piezoelectric film.SOLUTION: A piezoelectric element 4 includes: a first electrode 11; a first piezoelectric film 12 that is formed on one surface of the first electrode 11 and made of a material containing AlN as a main component; and a second electrode 13 that is disposed on the surface opposite to the first electrode 11 side, of the first piezoelectric film 12. A first opening 13a that penetrates in the thickness direction is formed in the second electrode 13 in order to make contact with the first electrode 11. A second opening 12a that communicates with the first opening 13a and penetrates in the thickness direction is formed in the first piezoelectric film 12. The first opening 13a and the second opening 12a have substantially the same shape and size in a plan view as viewed from the normal direction with respect to the surface of the first electrode 11.SELECTED DRAWING: Figure 2
Inventors:
Kinya Ashikaga
Iida Castle
Iida Castle
Application Number:
JP2017065198A
Publication Date:
July 07, 2021
Filing Date:
March 29, 2017
Export Citation:
Assignee:
ROHM Co., Ltd.
International Classes:
H01L41/187; H01L41/047; H01L41/09; H01L41/107; H01L41/113; H01L41/332; H03H3/02; H03H9/17; H04R17/00; H04R31/00
Domestic Patent References:
| JP2008177933A | ||||
| JP2016076691A | ||||
| JP2012210804A | ||||
| JP2015050761A |
Foreign References:
| WO2016175013A1 |
Attorney, Agent or Firm:
Patent Business Corporation Ai Patent Office