Title:
PIEZOELECTRIC ELEMENT, MICROPHONE AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT
Document Type and Number:
Japanese Patent JP2023155792
Kind Code:
A
Abstract:
To provide a piezoelectric element, a microphone, and a method of manufacturing the piezoelectric element capable of reducing an increase in man-hours.SOLUTION: A piezoelectric element includes: a piezoelectric film 40 arranged on a support 10; an electric film 50 laminated on the piezoelectric film 40; through electrodes 61a, 62a formed inside hole parts 61b, 62b penetrating the piezoelectric film 40; and an interlayer insulating film 82 which is formed on the wall surfaces of the holes 61a and 62a and on the top of the piezoelectric film 40, and insulates the piezoelectric film 40 from the through electrodes 61b, 62b. A vibrating part 20 includes a piezoelectric film 40 and an electrode film 50, and has a support region 21a supported by the support 10 and a floating region 21b floating from the support 10. The floating region 21b has a plurality of vibration regions partitioned by slits 30, and in the slits 30, an additional thin film 81 made of the same material as the interlayer insulating film 82 is arranged.SELECTED DRAWING: Figure 2
Inventors:
SUZUKI YOSHIMI
YAMADA HIDEO
USUI TAKAHIDE
IKEGAMI NAOKATSU
KATAUE TAKAHARU
YAMADA HIDEO
USUI TAKAHIDE
IKEGAMI NAOKATSU
KATAUE TAKAHARU
Application Number:
JP2022065336A
Publication Date:
October 23, 2023
Filing Date:
April 11, 2022
Export Citation:
Assignee:
DENSO CORP
TOYOTA MOTOR CORP
MIRISE TECH CORP
NISSHINBO MICRO DEVICES INC
TOYOTA MOTOR CORP
MIRISE TECH CORP
NISSHINBO MICRO DEVICES INC
International Classes:
H04R17/02; H04R17/00; H04R31/00; H10N30/067; H10N30/30; H10N30/50; H10N30/88
Attorney, Agent or Firm:
Patent Attorney Corporation Yuuai Patent Office