To provide a piezoelectric tuning-fork vibrator which is small-sized while maintaining stable and excellent characteristics, and achieves mass production by disposing a number of piezoelectric tuning-fork vibrators within a wafer substrate, and also to provide a method of manufacturing the same.
The piezoelectric tuning-fork vibrator is comprised of: a base part in a rectangular plate shape; and (n) pieces of vibrating arms each disposed in parallel with each other within the same plane with the same thickness as that of the base part while connecting its one terminal to one side of the base part. When a width of the vibrating arm is defined as W1, a mutual interval of vibrating arms is defined as W2 and a width of the side of the base part connecting the vibrating arm is defined as W3, a relationship approximately meeting W3=2n×W1+(2n-1)×W2 is established. In manufacturing, a first column 101 linearly arraying distal ends of the vibrating arms on a substrate and a second column 102 arrayed in a direction of rotating the first column 101 at 180° are disposed while facing each other, and vibrating arm of the second column 102 is disposed between vibrating arms of mutually adjacent piezoelectric tuning-fork vibrator patterns of the first column 101.
CHIBA MITSUHARU
SHUDA KOICHI
ABE HIROSHI
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