Title:
PIEZOELECTRIC TYPE PRESSURE SENSOR
Document Type and Number:
Japanese Patent JPH04313037
Kind Code:
A
Abstract:
PURPOSE:To improve the temperature characteristics of a sensor by changing the entire guide member or a part of the guide member located in the inside of a sensor into a temperature compensating capacitor. CONSTITUTION:A guide member 15 is a member for supporting a pressure transfer member 16 at the center of a pressure receiving surface 17 at a right angle. As the material of the guide member 15, a temperature compensating capacitor having the reverse characteristic of the temperature from that of a piezoelectric element 13 is used. The member 15 is connected in parallel with the piezoelectric element 13. Thus, the temperature change of capacitance is canceled. In the sensor wherein a charge amplifier is used as a signal amplifier circuit, the guide member 15 is formed of the same material as that of the piezoelectric element 13 and made to be a feedback capacitor for an amplifier. Thus the temperature is compensated.
Inventors:
KUSAKABE HIROKI
OKAUCHI SUSUMU
TAKIGAWA MASUO
OKAUCHI SUSUMU
TAKIGAWA MASUO
Application Number:
JP7886591A
Publication Date:
November 05, 1992
Filing Date:
April 11, 1991
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01L23/10; (IPC1-7): G01L23/10
Attorney, Agent or Firm:
Akira Kobiji (2 outside)